JPH0477254U - - Google Patents

Info

Publication number
JPH0477254U
JPH0477254U JP12031390U JP12031390U JPH0477254U JP H0477254 U JPH0477254 U JP H0477254U JP 12031390 U JP12031390 U JP 12031390U JP 12031390 U JP12031390 U JP 12031390U JP H0477254 U JPH0477254 U JP H0477254U
Authority
JP
Japan
Prior art keywords
wafer
guide
supporter
slidable
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12031390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12031390U priority Critical patent/JPH0477254U/ja
Publication of JPH0477254U publication Critical patent/JPH0477254U/ja
Pending legal-status Critical Current

Links

JP12031390U 1990-11-19 1990-11-19 Pending JPH0477254U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12031390U JPH0477254U (en]) 1990-11-19 1990-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12031390U JPH0477254U (en]) 1990-11-19 1990-11-19

Publications (1)

Publication Number Publication Date
JPH0477254U true JPH0477254U (en]) 1992-07-06

Family

ID=31868224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12031390U Pending JPH0477254U (en]) 1990-11-19 1990-11-19

Country Status (1)

Country Link
JP (1) JPH0477254U (en])

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